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ISR Ph.D. student Soon Cho was awarded the Outstanding Paper Award in the student paper competition at Sematech's Advanced Equipment Control/Advanced Process Control Symposium in Colorado Springs. Soon Cho is advised by Professor Gary Rubloff (MNE/ISR) and is a member of his research group. His report, "Real-Time, In-Situ Metrology to Drive Real-Time Advanced Process Control," described his work with others in Dr. Rubloff's group on using in-situ chemical sensors to achieve process metrology and associated real-time process control. Soon has applied these methods to Si ULSI technology and more recently to GaN MOCVD processes in a joint project at Northrop Grumman. The AEC/APC symposium is the prime conference for R&D achievements in advanced process control.
October 14, 2003
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